About: http://webisa.webdatacommons.org/101323160

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The passivation film 1116 is formed of the insulating film including a carbon film, a silicon nitride film, or a silicon nitride oxide film, in a single-layer or in a laminated-layer structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es