| http://www.w3.org/ns/prov#value | - A void is an enclosed area devoid of deposited material that is typically formed when two adjoining cusps over step corners of an aperture meet across the space adjoining the vertical feature to form a ???bridge.??? Because sputtered atoms (in PVD) typically follow ???line-of-sight??? trajectories, a shadowing effect occurs at the aperture and leads to a thinner growth of the metal deposited withi
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