About: http://webisa.webdatacommons.org/104315075

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the calibration data may be produced using simulation methods including lithographic simulation methods combined with scatterometry simulation methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com