| http://www.w3.org/ns/prov#value | - However, when other conditions, for example, the types and amounts of first and second reaction gases, the temperature of a wafer block, or the like, were changed, specific resistance values were low at the intervals D within a range of about 20 to 50 mm, and it can be concluded that the interval D is an important structural property in forming an excellent thin film. [0037] The interval within th
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