| http://www.w3.org/ns/prov#value | - However, various inert gases such as neon can be used instead of argon. [0026] The second reaction gas supply unit 420 includes a second reaction material container 426 filled with a second liquid reaction material to be vaporized and used as a second reaction gas, an MFC for controlling the flow of a carrier gas for transferring the second reaction gas to the reactor 100, a first flow control val
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