About: http://webisa.webdatacommons.org/114580531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Particularly, ions, such as hydrogen ions or helium ions, are implanted within the top surface of an oxidized silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es