| http://www.w3.org/ns/prov#value | - On the other hand, the lateral wall of the pattern, which is an accurate reproduction of the resist pattern 46 employed at the metal plating, also has fine irregularity caused by fine irregularity of the lateral wall of the resist owing to the instability of the stationary wave or of the EB exposure beam, dissolution rate variation in the resist development, and other causes.
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