About: http://webisa.webdatacommons.org/128795073

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	e from positive chemically amplified resist material including polyvinylphenol whose soubility in al
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au