About: http://webisa.webdatacommons.org/129085681

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Electrodes 13 and 19 are then formed on the inner surfaces of both the grooves 15 and the shallow grooves 18 through a process such as a vacuum vapor deposition and a sputtering.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com