About: http://webisa.webdatacommons.org/132924324

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, any insulating material other than the silicon nitride can be used for forming the insulating thin film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com