About: http://webisa.webdatacommons.org/135531915

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The insulating layer 274 can be SiO2, Si3N4, SiON, Ta2O5, ZrO2, Al2O3, or other material having similar insulating and structural properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es