About: http://webisa.webdatacommons.org/135840136

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, there is a problem in that it is hard to make a patterning dimension uniform if a height of a film to be patterned is not uniform.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de