| http://www.w3.org/ns/prov#value | - The nozzle plate 24 is made of a material selected from metal such as nickel or a polymeric material such as a polyimide available from Ube Industries, Ltd of Tokyo, Japan under the trade name UPILEX. A preferred material for the nozzle plate 24 is a polymeric material and the nozzle holes 26 are made such as by laser ablating the polymeric material.
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