About: http://webisa.webdatacommons.org/146636153

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the typical lithography excimer laser, such as manufactured by Cymer Corporation, San Diego, Calif. and Lambda Physik of Goettingen, Germany, does not have very good pulse-to-pulse stability (e.g., only about 10% (3??)).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com