About: http://webisa.webdatacommons.org/152595560

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another alternative embodiment, nitrogen may be introduced into amorphous carbon layer 60 using a thermal diffusion process, in which a later of material including nitrogen is deposited above the amorphous carbon material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com