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Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Precision engineering also requires precision simulation and modeling, as Dr. Peter Ventzek of Tokyo Electron will describe for plasma chemistries used in etching and other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	electroiq.com