About: http://webisa.webdatacommons.org/154952309

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film thicknesses of the cap materials 91 to 93 are for example about 120 nm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com