About: http://webisa.webdatacommons.org/158997656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Charts, such as the ones illustrated in FIGS. 8A and 8B, may be used to determine the energy levels at which to set the electron beam 400 so that the desired layers are penetrated by the electron beam.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com