| http://www.w3.org/ns/prov#value | - Stress inducing spacer material adjacent selected sides of the gate region imparts stress, i.e. tension or compression, to at least the channel region of the substrate. [0014] In another aspect, this invention comprises an IC chip comprising, and a method of making on the IC chip, a plurality of stressed SOI regions and a plurality of unstressed SOI regions for use in FET and/or device manufacturi
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