About: http://webisa.webdatacommons.org/165557523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9A is a plan view of the shaping plate having a wafer positioned above the shaping plate wherein the wafer has continuous and intermittent deposition regions;
http://www.w3.org/ns/prov#wasQuotedFrom	google.es