About: http://webisa.webdatacommons.org/166121232

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process of claim 4, wherein contacting the substrate with a vapor-phase pulse of one or more plasma-excited nitrogen source chemicals occurs during a period of time other than the first period of time.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr