About: http://webisa.webdatacommons.org/166516084

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plate must be formed of materials such as quartz which are suitable for carrying the etchant-containing process gases.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com