About: http://webisa.webdatacommons.org/167015231

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The plasma generation chamber 2 is supplied with an ionizable gas such as nitrogen, ammonia, carbon dioxide, hydrogen, or a noble gas, e.g. argon or helium, or any mixture thereof, via a gas supply line 3.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr