About: http://webisa.webdatacommons.org/167123668

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 9, wherein the layer including carbon has a thickness of between approximately 100 and 1500 angstroms.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr