About: http://webisa.webdatacommons.org/167931119

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Juli 2007Semitool, Inc.Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpiecesUS724756321.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de