About: http://webisa.webdatacommons.org/170167133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, what is needed is a is a method and apparatus for processing an array of SLM mirrors to produce a phase step in respective mirrors in the array.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com