| http://www.w3.org/ns/prov#value | - FIG. 1A is a top view, FIG. 1B is a cross-sectional view taken along a dashed line x-y in FIG. 1A, and FIG. 1C is a cross-sectional view taken along a dashed line o-p in FIG. 1A. In FIG. 1A, illustration of part of a thin film and the like is omitted.
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