About: http://webisa.webdatacommons.org/175778758

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the substrate, for example, usable are a silicon wafer, a silicon wafer having thereon various insulating films, electrodes or electric wires, a blank mask, a semiconductor wafer of III-V compounds such as GaAs, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com