About: http://webisa.webdatacommons.org/176008728

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently an insulating materialcontaining substantially no oxygen, such as silicon nitride, polyimide or others is deposited on the entire surface to form the insulating layer 44.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com