| http://www.w3.org/ns/prov#value | - C. in an atmosphere where saturated hydrocarbon and unsaturated hydrocarbon such as CH.sub.4, C.sub.2H.sub.6 and C.sub.4F.sub.8, and a carbonizationseries gas including carbon except for aromatic hydrocarbon are injected into the process chamber, so that the chamber pressure is no more than 10 Torr.
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