About: http://webisa.webdatacommons.org/177195768

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 38A is a top plan view of a substrate including an array of scanners having removable material for on-substrate frequency tuning.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com