About: http://webisa.webdatacommons.org/178160657

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The multilayer ONO stack 420 may comprise, for example, a first oxide layer, such as SiO2 formed over the substrate 408, as well as a nitride layer formed over the first oxide, and second oxide layer formed over the nitride layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr