| http://www.w3.org/ns/prov#value | - o be equal in linear expansion coefficient to the sensor chip 1 as much as possible; the joining portion 21 is made of a ceramic, such as SiC, or a borosilicate glass for providing a sensor excellent in temperature property; and the thin wall portion 22 is made of a ceramic, such as SiC, a borosilicate glass, or a metallic material such as a Fe-Ni alloy.
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