About: http://webisa.webdatacommons.org/182653116

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 10A and 10B respectively are a plan view and a cross sectional view of a photomask for forming a contact hole;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com