About: http://webisa.webdatacommons.org/184017299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 11 is a graph showing the accumulated deposition thickness dependence of the MD in a case of utilizing the immediately-after-maintenance dry pump data for the reference space.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com