About: http://webisa.webdatacommons.org/185513328

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is noted that it is common practice for optical terms to be used in describing electron-beam lithography systems, thus, terms such as lens" and optical axis" are used to describe features of an electron-beam lithography system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com