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http://webisa.webdatacommons.org/187050467
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Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value
Note also that the value of n used for grouping at step 130 may to some extent be empirically determined. Specifically factors such as the wavelength of the light used (.lambda.), the numerical aperture (N.A.), the resist used, and more.
http://www.w3.org/ns/prov#wasQuotedFrom
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