About: http://webisa.webdatacommons.org/188482254

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Ion assisted deposition, sputtering, CVD, PECVD, sol-gel and other processes may be used to deposit such layers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com