About: http://webisa.webdatacommons.org/188630339

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, electron-beam deposition may be difficult to control, particularly for the deposition of evaporatively unstable materials such as some inorganic nonmetallic materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es