About: http://webisa.webdatacommons.org/189444005

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is an example of a multi-axis scanner mechanically coupled across a torsion arm to stacked piezoelectric actuators.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com