About: http://webisa.webdatacommons.org/191348011

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Sputter etching is a process whereby ionized inert atoms, such as argon, are accelerated by an electric field and allowed to collide against a material to be etched, physically dislodging particles therefrom.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com