| http://www.w3.org/ns/prov#value | - Preferably, the support layer 160 is made of one selected from the group consisting of a semiconductor substrate, such as silicon (Si), gallium arsenide (GaAs) or germanium (Ge), a metal substrate, such as Cu or W, a substrate including metal, and is bonded to the upper surfaces of the first electrodes 150 a and 150 b.
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