About: http://webisa.webdatacommons.org/197982941

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a variety of ions, such as argon, nitrogen or oxygen, can be utilized for implantation at surface positions of a substrate corresponding to the micro-locations.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com