About: http://webisa.webdatacommons.org/200562015

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Chamber 120 may be a vacuum chamber for carrying out processes such as film deposition, etching, annealing, and so forth on wafer 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com