About: http://webisa.webdatacommons.org/202567404

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the substrate material is silicon, gallium arsenide, sapphire or other suitable material with like thermal expansion coefficients.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com