| http://www.w3.org/ns/prov#value | - Upon receipt of a rotation speed signal from the driver 20, the polishing head 12 is rotated on the axis of the rotary shaft 15 at a rotation speed according to the rotation speed signal; and further, upon receipt of a pressurization signal from the driver 20, the polishing head 12 is appropriately moved along the vertical direction in such a manner as to act a pressure according to the pressuriza
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