About: http://webisa.webdatacommons.org/208024012

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such an etching process may be based on an isotropic etching process such as a dry etching process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com