| http://www.w3.org/ns/prov#value | - wherein the first solution is a developing solution and the second solution is at least one of an HMDS, a dimethylsilane, a dimethylamido, and an activator, the apparatus, further comprising: a temperature regulating mechanism, disposed between the mixing mechanism and the nozzle, for regulating a temperature of the mixed solution to be supplied to the nozzle. 7.
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