About: http://webisa.webdatacommons.org/214936200

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, what is needed is an apparatus and method that allow for more rapid and reliable calibration of a programmable patterning device, for example using measurements made at substrate level.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com