About: http://webisa.webdatacommons.org/21525086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 40 may include a semiconductor substrate, such as silicon (Si); an insulative substrate, such as glass or plastic; or a metal substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com